Auger Spectroscopy
Auger electron spectroscopy is a surface sensitive technique, that can be simply described as a two step process: 1. Ionisation by removing a core electron (usually by high energy electrons or photons); and 2. Relaxation & Auger emission.
It is used for chemical analysis and is highly sensitivity, typically down to 1% monolayer coverage (except for H and He).
It provides a means of monitoring cleanliness of surface, and can be used for quantitative compositional analysis by comparing with known standard samples.
Facilities Include:
VG Escalab 250, with monochromated or twin anode source.
Applications Include:
- Elemental analysis of surfaces
- Depth profiling (near the surface)
- Monitoring surface cleanliness
- Spatially resolved scanning
- Quantitative compositional analysis of surfaces